Synthesis of WN(NMe 2 ) 3 as a Precursor for the Deposition of WN x Nanospheres-Reference-Cited by-同舟云学术

Synthesis of WN(NMe 2 ) 3 as a Precursor for the Deposition of WN x Nanospheres

Author:

McClain K. Randall¹,O'Donohue Christopher²,Shi Zhiwei³,Walker Amy V.³,Abboud Khalil A.¹,Anderson Tim²,McElwee‐White Lisa¹

Affiliation:

1. Department of Chemistry, University of Florida, Gainesville, Florida, 32611‐7200, USA, Fax: +1‐352‐846‐0296, http://www.chem.ufl.edu/~lmwhite/

2. Department of Chemical Engineering, University of Florida, Gainesville, Florida, 32611‐6005, USA, http://www.che.ufl.edu/faculty/anderson/

3. Department of Materials Science and Engineering, University of Texas at Dallas, Richardson, Texas 75080, USA

Publisher

Wiley

Subject

Inorganic Chemistry

Link

Reference69 articles.

2. P. Singer inSemiconductor International 2006.

3. ITRS International SEMATECH Austin TX 2011 http://www.itrs.net/Links/2011ITRS/Home2011.htm.

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