Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces-Reference-Cited by-同舟云学术

Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces

Published:2018-10-10 Issue:2 Volume:216 Page:1800569
ISSN:1862-6300
Container-title:physica status solidi (a)
language:en
Short-container-title:Phys. Status Solidi A

Author:

Sandu Cosmin Silviu¹²^ORCID,Parsapour Fazel¹,Mertin Stefan¹,Pashchenko Vladimir¹,Matloub Ramin³,LaGrange Thomas⁴,Heinz Bernd⁵,Muralt Paul¹

Affiliation:

1. Electroceramic Thin Films Group; École Polytechnique Fédérale de Lausanne EPFL; CH-1015 Lausanne Switzerland

2. Department of Physics; University of Craiova; 200585 Craiova Romania

3. PIEMACS, EPFL Innovation Park; Batiment C 1015 Lausanne Switzerland

4. Interdisciplinary Centre for Electron Microscopy (CIME); École Polytechnique Fédérale de Lausanne (EPFL); CH-1015 Lausanne Switzerland

5. Evatec AG; CH-9477 Trübbach Switzerland

Funder

Comission for Technology and Innovation CTI of Switzerland

Austrian Smart System Integration Research Center

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/pssa.201800569/fullpdf

Reference36 articles.

1. Influence of growth temperature and scandium concentration on piezoelectric response of scandium aluminum nitride alloy thin films

2. Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering

3. Piezoelectric Al1−xScxN thin films: A semiconductor compatible solution for mechanical energy harvesting and sensors

4. Influence of scandium concentration on power generation figure of merit of scandium aluminum nitride thin films

5. Stress controlled pulsed direct current co-sputtered Al1−xScxN as piezoelectric phase for micromechanical sensor applications

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