Determination of microparticle characteristics in an etching plasma
Author:
Affiliation:
1. Department of Applied Physics; Eindhoven University of Technology; Eindhoven the Netherlands
2. CASA; Eindhoven University of Technology; Eindhoven the Netherlands
3. Philips Lighting; Eindhoven the Netherlands
Funder
Stichting voor Fundamenteel Onderzoek der Materie
Publisher
Wiley
Subject
Condensed Matter Physics
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/ctpp.201700217/fullpdf
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