Estimation of Plasma Parameters for Microwave-Sustained Ar/He Plasma Jets at Atmospheric Pressure
Author:
Publisher
Wiley
Subject
Condensed Matter Physics
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/ctpp.201010148/fullpdf
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1. Etching process of silicon dioxide with nonequilibrium atmospheric pressure plasma
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