Review of ferroelectric field‐effect transistors for three‐dimensional storage applications
Author:
Affiliation:
1. Department of Materials Science and Engineering and Inter‐University Semiconductor Research Center Seoul National University Seoul 08826 Republic of Korea
2. SK hynix Inc. Icheon Gyeonggi‐do 17336 Republic of Korea
Funder
National Research Foundation of Korea
Publisher
Wiley
Subject
General Medicine
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/nano.202000281
Reference88 articles.
1. Ferroelectricity in hafnium oxide thin films
2. Ferroelectric hafnium oxide for ferroelectric random-access memories and ferroelectric field-effect transistors
3. Review and perspective on ferroelectric HfO2-based thin films for memory applications
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