Development of an energy-dispersive X-ray spectroscopy analyzer employing superconducting tunnel junction array detectors toward nanometer-scale elemental mapping
Author:
Affiliation:
1. National Institute of Advanced Industrial Science and Technology (AIST); 1-1-1 Umezono, Tsukuba Ibaraki 305-8568 Japan
Publisher
Wiley
Subject
Spectroscopy
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