1. School of Mechanical Engineering Sungkyunkwan University (SKKU) Suwon‐si Gyeonggi‐do 16419 Republic of Korea
2. AVP process development team Samsung Electronics Cheonan‐si Chungcheongnam‐do 31086 South Korea
3. SKKU Advanced Institute of Nanotechnology (SAINT) Sungkyunkwan University Suwon 16419 Republic of Korea
4. Department of Nano Science and Technology Sungkyunkwan University Suwon 16419 Republic of Korea
5. Park Systems Corp R&D Center Suwon 16229 Republic of Korea
6. Department of Nano Engineering Sungkyunkwan University Suwon 16419 Republic of Korea