The application of ion beam bevel sectioning and post-sputter etch treatment in Auger crater-edge profiling
Author:
Publisher
Wiley
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference18 articles.
1. J. Electrochem. Soc. Rev. News, May (1983).
2. Crater‐edge profiling in interface analysis employing ion‐beam etching and AES
3. Examination of MBE GaAs/Al0.3Ga0.7As superlattices by Auger electron spectroscopy
4. Optimized depth resolution in ion-sputtered and lapped compositional profiles with Auger electron spectroscopy
5. Software for scanning Auger microscopy
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