The role of the gradient film properties in silica moisture barriers synthesized in a roll-to-roll atmospheric pressure plasma enhanced CVD reactor-Reference-Cited by-同舟云学术

The role of the gradient film properties in silica moisture barriers synthesized in a roll-to-roll atmospheric pressure plasma enhanced CVD reactor

Published:2017-08-04 Issue:1 Volume:15 Page:1700093
ISSN:1612-8850
Container-title:Plasma Processes and Polymers
language:en
Short-container-title:Plasma Process Polym

Author:

Meshkova Anna S.¹²^ORCID,Liu Yaoge¹²,Elam Fiona M.¹²³,Starostin Sergey A.³,van de Sanden Mauritius C. M.¹²,de Vries Hindrik W.¹

Affiliation:

1. DIFFER - Dutch Institute For Fundamental Energy Research; P.O. Box 6336 5600 HH Eindhoven The Netherlands

2. Plasma and Materials Processing Group, Department of Applied Physics; Eindhoven University of Technology; P.O. Box 513 5600 MB Eindhoven The Netherlands

3. FUJIFILM Manufacturing Europe B.V.; P.O. Box 90156 5000 LJ Tilburg The Netherlands

Funder

Nederlandse Organisatie voor Wetenschappelijk Onderzoek

Publisher

Wiley

Subject

Polymers and Plastics,Condensed Matter Physics

Reference26 articles.

1. Towards Roll-to-Roll Deposition of High Quality Moisture Barrier Films on Polymers by Atmospheric Pressure Plasma Assisted Process

2. Cold atmospheric plasma: Sources, processes, and applications

3. Status and potential of atmospheric plasma processing of materials

4. Atmospheric plasmas for thin film deposition: A critical review

5. Atmospheric pressure roll-to-roll plasma enhanced CVD of high quality silica-like bilayer encapsulation films

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