Effects of Radical Species on Structural and Electronic Properties of Amorphous Carbon Films Deposited by Radical-Injection Plasma-Enhanced Chemical Vapor Deposition-Reference-Cited by-同舟云学术

Effects of Radical Species on Structural and Electronic Properties of Amorphous Carbon Films Deposited by Radical-Injection Plasma-Enhanced Chemical Vapor Deposition

Published:2016-02-16 Issue:7 Volume:13 Page:730-736
ISSN:1612-8850
Container-title:Plasma Processes and Polymers
language:en
Short-container-title:Plasma Process. Polym.

Author:

Jia Lingyun¹,Sugiura Hirotsugu¹,Kondo Hiroki¹,Takeda Keigo¹,Ishikawa Kenji¹,Oda Osamu¹,Sekine Makoto¹,Hiramatsu Mineo²,Hori Masaru¹

Affiliation:

1. Graduate School of Engineering; Nagoya University; Nagoya 464-8603 Japan

2. Graduate School of Electrical and Electronic Engineering; Meijo University; Nagoya 468-8502 Japan

Publisher

Wiley

Subject

Polymers and Plastics,Condensed Matter Physics

Reference41 articles.

1. Characteristics of Diamond-Like Carbon Films Deposited on Polymer Dental Materials

2. Preparation of Amorphous Carbon Films and Evaluation of Its Optical Properties and Gas Barrier Property

3. Biocompatibility of Doped Diamond-Like Carbon Coatings for Medical Implants

4. Amorphous carbon

5. Amorphous diamond-like carbon films—a hard anti-reflecting coating for silicon solar cells

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