Thin Metal Film Deposition on Microparticles Trapped in RF Magnetron Discharge Plasma
Author:
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/ppap.201000138/fullpdf
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2. Azimuthal inhomogeneities of axially symmetric rf discharge plasma in arc-shaped magnetic field;Journal of Physics: Conference Series;2019-01
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