Polymer etching by atmospheric‐pressure plasma jet and surface micro‐discharge sources: Activation energy analysis and etching directionality
Author:
Affiliation:
1. Department of Materials Science and Engineering and the Institute for Research in Electronics and Applied PhysicsUniversity of MarylandCollege ParkMaryland
2. IBM TJ Watson Research CenterYorktown HeightsNew York
Funder
National Science Foundation
Fusion Energy Sciences
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/ppap.201700217
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