1. Department of Microelectronic Science and EngineeringNingbo University Ningbo 315211 P. R. China
2. School of Physical Science and TechnologyNingbo University Ningbo 315211 P. R. China
3. Department of Chemistry and Chemical EngineeringQufu Normal University Qufu 273165 P. R. China
4. Technology Development DepartmentGLOBALFOUNDRIES (Singapore) Pte. Ltd. 60 Woodlands Industrial Park D, Street 2 Singapore 738406 Singapore