Evaluation of capacitance changes of capacitive micromachined ultrasonic transducers for ultrasonic diagnoses by charge-injection-Reference-Cited by-同舟云学术

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Evaluation of capacitance changes of capacitive micromachined ultrasonic transducers for ultrasonic diagnoses by charge-injection

Published:2018-04-17 Issue:6 Volume:101 Page:40-47
ISSN:1942-9533
Container-title:Electronics and Communications in Japan
language:en
Short-container-title:Electron Comm Jpn

Author:

Aono Takanori¹,Yoshimura Yasuhiro¹,Machida Shuntaro²

Affiliation:

1. Research and Development Group; Center for Technology; Innovation-Mechanical Engineering; Hitachi, Ltd. 832-2, Horiguchi, Hitachinaka, Ibaraki 312-0034 Japan

2. Research and Development Group; Center for Technology; Innovation-Electronics; Hitachi, Ltd. 1-280, Higashi-koigakubo, Kokubunji, Tokyo 185-8601 Japan

Publisher

Wiley

Subject

Applied Mathematics,Electrical and Electronic Engineering,Computer Networks and Communications,General Physics and Astronomy,Signal Processing

Reference13 articles.

1. Diagnostic ultrasound;Bamber;Phys Med Imag,1988

2. Draft C Wagner P Bymaster B Panda S Patel K Ladabaum I cMUTs and electronic for 2D and 3D imaging: monolithic integrateion, in-handle chip sets and system implications 2005 467 478

3. Capacitive micromachined ultrasonic transducers for medical imaging and therapy;Khuri-Yakub;J Micromech Microeng.,2011

4. Sako A Tanaka H Sato M Nagata T Optimization of backside structures with wideband reflectivity reduction for a CMUT 2015 0468

5. Tanaka H Azuma T Machida S Hashiba K Kobayashi T Beam structure for CMUT with desired frequency spectrum 2008 500 503

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