From FIB-SIMS to SIMS-FIB. The prospects for a 10 nm lateral resolution SIMS instrument with full FIB functionality-Reference-Cited by-同舟云学术

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From FIB-SIMS to SIMS-FIB. The prospects for a 10 nm lateral resolution SIMS instrument with full FIB functionality

Published:2010-05-19 Issue:1-2 Volume:43 Page:479-483
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf. Interface Anal.

Author:

McPhail David S.,Li Libing,Chater Richard J.,Yakovlev Nikolai,Seng Hweeleng

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference7 articles.

1. L. Li D. S. McPhail N. Yakovlev H. Seng Strategies for Improving the Sensitivity of Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS) ibid

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Practical Aspects of Focused Ion Beam Time-of-Flight Secondary Ion Mass Spectrometry Analysis Enhanced by Fluorine Gas Coinjection;Chemistry of Materials;2021-02-16

2. Novel Applications of FIB-SEM-Based ToF-SIMS in Atom Probe Tomography Workflows;Microscopy and Microanalysis;2020-03-09

3. FIBSIMS: A review of secondary ion mass spectrometry for analytical dual beam focussed ion beam instruments;PROG CRYST GROWTH CH;2019

4. FIBSIMS: A review of secondary ion mass spectrometry for analytical dual beam focussed ion beam instruments;Progress in Crystal Growth and Characterization of Materials;2019-02

5. Argon cluster cleaning of Ga + FIB‐milled sections of organic and hybrid materials;Surface and Interface Analysis;2018-08-16

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