Infrared absorption sensor for multiple gas sensing. Development of a Fabry-Perot spectrometer with ultrawide wavelength range

Author:

Enomoto Tetsuya,Suzuki Megumi,Iwaki Takao,Wado Hiroyuki,Takeuchi Yukihiro

Publisher

Wiley

Subject

Applied Mathematics,Electrical and Electronic Engineering,Computer Networks and Communications,General Physics and Astronomy,Signal Processing

Reference10 articles.

1. Neumann N

2. Wide wavelength range tunable Fabry-Perot filter for gas measurement.;Suzuki;IEEJ Trans Sensors and Micromachines,2003

3. Electrically unstable micromachined Fabry-Perot interferometer in gas analysis.;Blomberg;Physica Scripta,1997

4. Tunable Fabry-Perot interferometer for 3-5 μm wavelength with bulk micromachined reflector carrier.;Neumann;MOEMS and Miniaturized Systems

5. Optronics Co, Ltd.

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