Carbon nanotube integration into MEMS devices
Author:
Publisher
Wiley
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference18 articles.
1. MEMS-based microelectrode system incorporating carbon nanotubes for ionization gas sensing
2. Integration of suspended carbon nanotubes into micro-fabricated devices
3. Process integration of carbon nanotubes into microelectromechanical systems
4. A flexible carbon nanotube field emitter fabricated on a polymer substrate by a laser separation method
5. T. Helbling S. Drittenbass L. Durrer C. Roman C. Hierold Proceedings of IEEE, 22nd International Conference on Micro Electro Mechanical Systems, MEMS 2009 575 578
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