1. Bryzek , J. 2013 iNEMI Spring Member Meeting and Webinar Berkeley, CA
2. Paris Tech Review 2013 http://www.paristechreview.com/2013/12/09/the-mems-revolution/
3. Frequency-selective MEMS for miniaturized low-power communication devices;Nguyen;IEEE Transactions on Microwave Theory and Techniques,1999
4. MEMS technology for timing and frequency control;Nguyen;IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control,2007
5. Roukes , M.L. 2004 Technical Digest of IEEE International Electron Devices Meeting, 2004, IEDM 539 542