Optical Emission Spectroscopy Analysis of Microwave Plasma‐Enhanced Chemical Vapor Deposition Systems Dynamic Gas Response-Reference-Cited by-同舟云学术

Optical Emission Spectroscopy Analysis of Microwave Plasma‐Enhanced Chemical Vapor Deposition Systems Dynamic Gas Response

Published:2022-08-31 Issue:4 Volume:220 Page:2200322
ISSN:1862-6300
Container-title:physica status solidi (a)
language:en
Short-container-title:Physica Status Solidi (a)

Author:

Lambert Nicolas¹²^ORCID,Sung Kil-Dong¹^ORCID,Mortet Vincent¹³^ORCID

Affiliation:

1. Department of Functional Materials Institute of Physics of the Czech Academy of Sciences 182 21 Prague Czech Republic

2. Faculty of Electrical Engineering Czech Technical University in Prague 166 27 Prague Czech Republic

3. Faculty of Biomedical Engineering Czech Technical University in Prague 272 01 Kladno Czech Republic

Funder

Grantová Agentura České Republiky

České Vysoké Učení Technické v Praze

Ministerstvo Školství, Mládeže a Tělovýchovy

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/pssa.202200322

Reference22 articles.

1. W. G.Eversole US3030188A 1962.

2. Growth of Diamond Seed Crystals by Vapor Deposition

3. Growth of diamond particles from methane-hydrogen gas

4. Diamond synthesis from gas phase in microwave plasma

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