Fabrication of High‐Quality Thin Single‐Crystal Diamond Membranes with Low Surface Roughness-Reference-Cited by-同舟云学术

Fabrication of High‐Quality Thin Single‐Crystal Diamond Membranes with Low Surface Roughness

Published:2022-12-11 Issue:4 Volume:220 Page:2200465
ISSN:1862-6300
Container-title:physica status solidi (a)
language:en
Short-container-title:Physica Status Solidi (a)

Author:

Heupel Julia¹^ORCID,Pallmann Maximillian²,Körber Jonathan²,Hunger David²³,Reithmaier Johann Peter¹,Popov Cyril¹

Affiliation:

1. Institute of Nanostructure Technologies and Analytics (INA) Center for Interdisciplinary Nanostructure Science and Technology (CINSaT) University of Kassel Heinrich-Plett-Str. 40 34132 Kassel Germany

2. Physikalisches Institut Karlsruhe Institute for Technology (KIT) Wolfgang-Gaede-Str.1 76131 Karlsruhe Germany

3. Institute for Quantum Materials and Technologies (IQMT) Karlsruhe Institute for Technology Hermann-von-Helmholtz-Platz 1 76344 Eggenstein-Leopoldshafen Germany

Funder

Bundesministerium für Bildung, Wissenschaft, Forschung und Technologie

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/pssa.202200465

Reference40 articles.

1. Scalable Fabrication of Integrated Nanophotonic Circuits on Arrays of Thin Single Crystal Diamond Membrane Windows

2. Bottom up engineering of single crystal diamond membranes with germanium vacancy color centers

3. Optically Coherent Nitrogen-Vacancy Centers in Micrometer-Thin Etched Diamond Membranes

4. Diamond Raman Laser Design and Performance

5. Diamond photonics

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