Potenzen des Puls-Magnetron-Sputterns (PMS)
Author:
Publisher
Wiley
Subject
Surfaces, Coatings and Films,Condensed Matter Physics
Reference9 articles.
1. Pulsed magnetron sputter technology
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3. Reactive d.c. high-rate sputtering as production technology
4. , , A Novel Solution for the Fast Deposition of Al2O3 by DC Reactive Magnetron Sputtering, Proc. 7th Int. Conf. IPAT Geneva, May 1987, 181.
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