Properties of positive resists. I. irradiation-induced degradation and sensitivity of certain methyl methacrylate copolymers
Author:
Publisher
Wiley
Subject
General Engineering,General Materials Science
Reference23 articles.
1. ACS Symposium Series;Thompson,1983
2. ACS Symposium Series;Bowden,1983
3. Parameters Affecting the Electron Beam Sensitivity of Poly(methyl methacrylate)
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