1. Key Laboratory of Microelectronic Devices & Integrated Technology Institute of Microelectronics Chinese Academy of Sciences Beijing 100029 P. R. China
2. University of Chinese Academy of Sciences Beijing 100049 P. R. China
3. School of Integrated Circuits Anhui University Hefei Anhui 230601 P. R. China
4. School of Microelectronics University of Science and Technology of China Hefei Anhui 230026 P. R. China
5. Center for Advanced Optoelectronic Functional Materials Research and Key Laboratory for UV Light‐Emitting Materials and Technology (Northeast Normal University) Ministry of Education Changchun 130024 P. R. China
6. Frontier Institute of Chip and System Fudan University Shanghai 200433 P. R. China