Electrohydrodynamic Printing‐Based Heterointegration of Quantum Dots on Suspended Nanophotonic Cavities

Abstract

AbstractNanophotonic structures are a foundation for the growing field of light‐based quantum networks and devices enabled by their ability to couple with and manipulate photons. Colloidal quantum dots (QDs) are uniquely suited to complement this range of devices due to their solution‐processability, broad tuneability, and near‐unity photoluminescence quantum yields in some cases. To bridge the gap between them, electrohydrodynamic inkjet (EHDIJ) printing serves as a highly precise and scalable nanomanufacturing method for deterministic positioning and deposition of attoliter‐scale QD droplets. This includes heterointegration in devices that are challenging to create by conventional subtractive semiconductor processing, such as QDs emitters coupled to substrate‐decoupled nanoscale resonant structures. In this work, the first successful application of EHDIJ printing for the integration of these colloidal QDs into suspended nanophotonic cavities is demonstrated, achieving selective single‐cavity deposition for cavity pairs as close as 100 nm apart. These results motivate the development of future suspended hetero‐integrated devices that utilize EHDIJ printing as a sustainable, additive, and scalable method for quantum photonics nanomanufacturing.