Harnessing a Vibroacoustic Mode for Enabling Smart Functions on Surface Acoustic Wave Devices ‐ Application to Icing Monitoring and Deicing

Abstract

AbstractMicroacoustic wave devices are essential components in the radio frequency (RF) electronics and microelectromechanical systems (MEMS) industry with increasing impact in various sensing and actuation applications. Reliable and smart operation of acoustic wave devices at low costs will cause a crucial advancement. Herein, this study presents the enablement of temperature and mechanical sensing capabilities in a Rayleigh‐mode standing surface acoustic wave (sSAW) chip device by harnessing an acoustic shear‐thickness dominant wave (SD) using the same set of electrodes. Most importantly, this mode is excited by switching the polarity of the sSAW transducer electrodes by simple electronics, allowing for direct and inexpensive compatibility with an existing setup. The method in the emergent topic of surface de‐icing is validated by continuously monitoring temperature and liquid–solid water phase changes using the SD mode, and on‐demand Rayleigh‐wave deicing with a negligible energy cost. The flexibility for adapting the system to different scenarios, and loads and the potential for scalability opens the path to impact in lab‐on‐a‐chip, internet of things (IoT) technology, and sectors requiring autonomous acoustic wave actuators.