Subject
Instrumentation,Atomic and Molecular Physics, and Optics
Reference5 articles.
1. Inst Phys Conf Ser No. 93;Joy,1988
2. Comparison between the experimental and theoretical modelling of linewidth measurements on photomasks;Nunn;Scanning,1990
3. The use of a novel image shearing technique on a scanning electron microscope for comparative measurement of linewidths on photomasks;Nunn;Scanning,1989
4. Linewidth measurement comparison between a photometric optical microscope and a scanning electron microscope backed with Monte Carlo trajectory computations;Nunn;SPIE,1991
Cited by
4 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Backscattered electron imaging of micro- and nanostructures: 1. Method of analysis;Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques;2014-07
2. Metrology of vlsi critical element sizes;Measurement Techniques;1999-01
3. Application of Low Voltage Scanning Electron Microscopy and Energy Dispersive X-Ray Spectroscopy;Impact of Electron and Scanning Probe Microscopy on Materials Research;1999
4. Multiparameter grating metrology using optical scatterometry;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1997-03