A study of electron beam-induced conductivity in resists-Reference-Cited by-同舟云学术

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A study of electron beam-induced conductivity in resists

Published:2006-12-06 Issue:4 Volume:21 Page:264-272
ISSN:0161-0457
Container-title:Scanning
language:en
Short-container-title:Scanning

Author:

Hwu J. J.,Joy D. C.

Publisher

Wiley

Subject

Instrumentation,Atomic and Molecular Physics, and Optics

Reference35 articles.

1. DuPont is the trademark of E. I. du Pont de Nemours & Company.

2. ULCOAT is the trademark of ULVAC Coating Corporation.

3. Electron-beam-induced conduction and dielectrics;Aris;J Phys C: Solid State Phys,1976

4. Discharge characteristics of photoconducting insulators;Batra;J Appl Phys,1970

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