1. Key Laboratory of Microelectronics Devices and Integration TechnologyInstitute of Microelectronics of Chinese Academy of Sciences Beijing 100029 China
2. School of ElectronicElectrical and Communication EngineeringUniversity of Chinese Academy of Sciences Beijing 100049 China
3. School of MicroelectronicsUniversity of Science and Technology of China Hefei Anhui 230026 China
4. Jiangsu National Synergetic Innovation Center for Advanced Materials (SICAM) Nanjing Jiangsu 210023 China
5. Henan Key Laboratory of Diamond Optoelectronic Materials and DevicesSchool of Physics and EngineeringZhengzhou University Zhengzhou 450001 China
6. National Laboratory for Infrared PhysicsShanghai Institute of Technical PhysicsChinese Academy of Sciences Shanghai 200083 China