Semiconductor crystal growth by sputter deposition
Author:
Publisher
Wiley
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference233 articles.
1. VII. On the electro-chemical polarity of gases
2. See for example, and (eds) Thin Film Processes, Sections II-2, II-3 and II-4. Academic Press, New York, (1978).
3. Incorporation of rare gases in sputtered amorphous metal films
4. Growth of high‐quality epitaxial GaAs films by sputter deposition
5. The behaviour of surfaces under ion bombardment
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