Three-dimensional Directed Assembly of Block Copolymers together with Two-dimensional Square and Rectangular Nanolithography
Author:
Publisher
Wiley
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/adma.201101813/fullpdf
Reference33 articles.
1. Block Copolymer Lithography: Periodic Arrays of ~10 11 Holes in 1 Square Centimeter
2. Controlling Polymer-Surface Interactions with Random Copolymer Brushes
3. Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates
4. Directed Assembly of Block Copolymer Blends into Nonregular Device-Oriented Structures
5. Evolution of Block Copolymer Lithography to Highly Ordered Square Arrays
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