Development of an Argon Gas Cluster Ion Beam for ToF‐SIMS Analysis
Author:
Affiliation:
1. Mass Spectrometry and Advanced Instrumentation Research Group, Division of Scientific InstrumentationKorea Basic Science Institute Cheongju Republic of Korea
Funder
Korea Basic Science Institute
Publisher
Wiley
Subject
General Chemistry
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/bkcs.11840
Reference27 articles.
1. Molecular depth profiling of multilayer structures of organic semiconductor materials by secondary ion mass spectrometry with large argon cluster ion beams
2. Molecular Depth Profiling with Argon Gas Cluster Ion Beams
3. Measuring Compositions in Organic Depth Profiling: Results from a VAMAS Interlaboratory Study
4. The Magic of Cluster SIMS
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