Studies of dissolution phenomena in microlithography-Reference-Cited by-同舟云学术

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Studies of dissolution phenomena in microlithography

Published:1987-02 Issue:4 Volume:27 Page:282-285
ISSN:0032-3888
Container-title:Polymer Engineering and Science
language:en
Short-container-title:Polym. Eng. Sci.

Author:

Krasicky P. D.,Groele R. J.,Jubinsky J. A.,Rodriguez F.,Namaste Y. M. N.,Obendorf S. K.

Publisher

Wiley

Subject

Materials Chemistry,Polymers and Plastics,General Chemistry,Materials Chemistry,Polymers and Plastics,General Chemistry

Reference4 articles.

1. In-situ measurement of dielectric thickness during etching or developing processes

2. Effects of molecular weight and plasticization on dissolution rates of thin polymer films

3. and SPIE Vol. 539 Advances in Resist Technology and Processing, 14 (1985).

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