Quantitative lateral resolution of a Quantum 2000 X-ray microprobe-Reference-Cited by-同舟云学术

Quantitative lateral resolution of a Quantum 2000 X-ray microprobe

Published:2008 Issue:3-4 Volume:40 Page:706-709
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf. Interface Anal.

Author:

Scheithauer U.

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference8 articles.

1. System Specifications for the Quantum 2000 Scanning ESCA Microprobe, Part No. 635486 Rev. D. Physical Electronics: Eden Prairie.

2. Service and Maintenance Handbook the Complete Quantum. Physical Electronics: Eden Prairie.

3. ISO/TR 19319. Surface Chemical Analysis—Auger Electron Spectroscopy and X-Ray Photoelectron Spectroscopy—Determination of Lateral Resolution, Analysis Area, and Sample Area Viewed by the Analyser, 2003.

4. Approach for determining area selectivity in small-area XPS analysis

5. Simulation of Energy Distribution for Scanning X-ray Probe

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