Multiscale and Uniform Liquid Metal Thin‐Film Patterning Based on Soft Lithography for 3D Heterogeneous Integrated Soft Microsystems: Additive Stamping and Subtractive Reverse Stamping
Author:
Affiliation:
1. School of Electrical and Computer Engineering Georgia Institute of Technology Atlanta GA 30332 USA
2. Institute for Electronics and Nanotechnology Georgia Institute of Technology Atlanta GA 30332 USA
Funder
National Science Foundation
Publisher
Wiley
Subject
Industrial and Manufacturing Engineering,Mechanics of Materials,General Materials Science
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/admt.201800061
Reference59 articles.
1. Functional Materials: From Hard to Soft Porous Frameworks
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5. CMOS-Technology-Enabled Flexible and Stretchable Electronics for Internet of Everything Applications
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