1. College of Electronic Information and Optical Engineering Nankai University Tianjin 300350 China
2. School of Physics and Electronics Central South University Changsha 410083 China
3. School of Physics and Microelectronics Zhengzhou University Zhengzhou 450001 China
4. Microsystem and Terahertz Research Center China Academy of Engineering Physics Chengdu 610200 China
5. Institute of Electronic Engineering China Academy of Engineering Physics Mianyang 621999 China
6. Tianjin Key Laboratory of Optoelectronic Sensor and Sensing Network Technology Nankai University Tianjin 300350 China
7. Key Laboratory of Photoelectronic Thin Film Devices and Technology of Tianjin Nankai University Tianjin 300350 China
8. Engineering Research Center of Thin Film Optoelectronics Technology Ministry of Education Nankai University Tianjin 300350 China