Affiliation:
1. National Key Laboratory of Materials for Integrated Circuits Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai 200050 China
2. University of Chinese Academy of Sciences Beijing 100029 China
3. Department of Physics Graduate School of Science and Technology Gunma University Maebashi 3718510 Japan
4. Department of Precision Instrument Center for Brain Inspired Computing Research Tsinghua University Beijing 100084 China
Abstract
Elemental tellurium electrical switch, relying on a transient crystal–liquid–crystal phase transition, has recently been proposed as a promising selector candidate for the next‐generation 3D high‐density memory, bridging performance gap in today's computer. Further miniaturization of the switch cell to increase memory density strongly depends on the scalability of the tellurium film, which, however, has not been experimentally studied. Herein, the tellurium films are prepared with the thickness downscaled from 400 to 2 nm and a significant increase is found in the bandgap from 0.29 to 0.91 eV, as predicted by ab initio molecular dynamics. Interestingly, the as‐deposited tellurium films with a thickness above 3 nm are in the crystalline trigonal phase, whereas 2 nm thick film suddenly becomes amorphous, observed by both Raman and transmission electron microscopies. In this finding, since the leakage current of the elemental tellurium switch is determined by both the Schottky barrier between tellurium/electrode interface and the bandgap of the tellurium film, a reduction in leakage current is predicted with further miniaturization.
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