Microstructure and mechanical properties of Ti–Si–C–N coatings deposited by hybrid arc enhanced magnetron sputtering
Author:
Publisher
Informa UK Limited
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://www.tandfonline.com/doi/pdf/10.1179/174329409X409332
Reference14 articles.
1. Characterisation of Ti1−xSixNy nanocomposite films
2. Influence of Si content on Nano-structured Ti–Si–N films coated by pulsed-d.c. plasma enhanced CVD
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4. Structural properties, internal stress and thermal stability of nc-TiN/a-Si3N4, nc-TiN/TiSix and nc-(Ti1−yAlySix)N superhard nanocomposite coatings reaching the hardness of diamond
5. Novel thermodynamically stable and oxidation resistant superhard coating materials
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