Phase maps for sputter deposited refractory metal oxide ceramic coatings: review of niobium oxide, yttrium oxide, and zirconium oxide growth
Author:
Publisher
Informa UK Limited
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Link
http://www.tandfonline.com/doi/pdf/10.1179/mst.1992.8.8.666
Reference25 articles.
1. Surface defects and thermodynamics of chemisorbed layers
2. Rare gas‐oxygen effects on the rf sputter deposition of platinum
3. Sputter deposition of platinum films in argon/oxygen and neon/oxygen discharges
4. Optical behavior of sputter‐deposited platinum‐oxide films
5. Optical behavior of sputter-deposited vanadium pentoxide
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