1. School of Microelectronics, Shanghai University, Shanghai, 200444, China
2. Shanghai Industrial μTechnology Research Institute, Shanghai, 201800, China
3. Shanghai Industrial μTechnology
Research Institute, Shanghai, 201800, China
4. School of Microelectronics, Shanghai University, Shanghai, 200444, China;
5. State Key Laboratory of Transducer Technology, Shanghai Institute of
Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China;
6. Academy of Experimental Medicine, Shanghai, China