DSAR

Author:

Ou Jiaojiao1,Yu Bei2,Xu Xiaoqing1,Mitra Joydeep3,Lin Yibo1,Pan David Z.1

Affiliation:

1. University of Texas at Austin, Austin, USA

2. Chinese University of Hong Kong, Hong Kong, USA

3. Mentor Graphics Corporation, Austin, USA

Publisher

ACM

Reference33 articles.

1. OpenSPARC T1. http://www.oracle.com/technetwork/systems/opensparc/index.html. OpenSPARC T1. http://www.oracle.com/technetwork/systems/opensparc/index.html.

2. Mask assignment and synthesis of DSA-MP hybrid lithography for sub-7nm contacts/vias

3. Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates

Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Enhanced and Efficient Guiding Template Design for Lamellar DSA With Graph Monomorphism;IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems;2023-11

2. Lamellar DSA-aware Detailed Routing Considering Double Patterning and Short Template Minimization;2023 60th ACM/IEEE Design Automation Conference (DAC);2023-07-09

3. Guiding template design for lamellar DSA with multiple patterning and self-aligned via process;Proceedings of the 39th International Conference on Computer-Aided Design;2020-11-02

4. DSA guiding template assignment with multiple redundant via and dummy via insertion;Integration;2020-01

5. HydraRoute;Proceedings of the 2019 on Great Lakes Symposium on VLSI;2019-05-13

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