Research on Error Compensation Technology of MEMS Accelerometer

Author:

Lin Guoxin1ORCID,He Zhaoyang1ORCID,Xin Wei1ORCID,Jin Yu1ORCID,Yang Yongyou2ORCID

Affiliation:

1. College of Information Science and Technology, Beijing University of Chemical Technology, Chinese mainland

2. CAS Engineering Laboratory for Deep Resources Equipment and Technology, Institute of Geology and Geophysics, Chinese Academy of Sciences, Chinese mainland

Publisher

ACM

Reference11 articles.

1. Zwahlen P, Nguyen A. M., Dong Y, Rudolf F, Pastre M, and Schmid H. 2010. Navigation grade MEMS accelerometer. In 2010 IEEE 23rd international conference on micro electro mechanical systems (MEMS). IEEE, 631-634

2. MEMS based geophones and seismometers

3. Rekik A. A, Azaïs F, Mailly F, Nouet P, and Masmoudi M. 2013. Self-test and self-calibration of a MEMS convective accelerometer. In 2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP). IEEE, 1-4

4. Grigorie T. L, Corcau I. J, and Tudosie A. N. 2017. Identification and compensation of the temperature influences in a miniature three-axial accelerometer based on the least squares method. In AIP Conference Proceedings (Vol. 1836, No. 1). AIP Publishing.

5. Xu D Yang Z Zhao H and Zhou X. 2016. A temperature compensation method for MEMS accelerometer based on LM_BP neural network. In 2016 IEEE SENSORS. 1-3.

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