Study on the Etching Characteristics and Thermal Conductivity of Porous Silicon Nanowire Arrays Using Highly Doped Silicon-Reference-Cited by-同舟云学术

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Study on the Etching Characteristics and Thermal Conductivity of Porous Silicon Nanowire Arrays Using Highly Doped Silicon

Published:2022-12-01 Issue:1 Volume:21 Page:40-45
ISSN:1348-0391
Container-title:e-Journal of Surface Science and Nanotechnology
language:en
Short-container-title:e-J. Surf. Sci. Nanotechnol.

Author:

Li Haibin¹,Kato Shinya¹,Kurokawa Yasuyoshi²,Soga Tetsuo¹

Affiliation:

1. Department of Electrical and Mechanical Engineering, Nagoya Institute of Technology

2. Department of Materials Process Engineering, Nagoya University

Publisher

Surface Science Society Japan

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics,Bioengineering,Biotechnology

Link

https://www.jstage.jst.go.jp/article/ejssnt/21/1/21_2023-006/_pdf

Reference37 articles.

1. [1] Y. Zhang, J. Wu, Y. Yang, Y. Qu, L. Jia, T. Moein, B. Jia, and D. J. Moss, ACS Appl. Mater. Interfaces 12, 33094 (2020).

2. [2] M. Akbari-Saatlu, M. Procek, C. Mattsson, G. Thungström, H.-E. Nilsson, W. Xiong, B. Xu, Y. Li, and H. H. Radamson, Nanomaterials 10, 2215 (2020).

3. [3] M. K. Sahoo and P. Kale, J. Materiomics 5, 34 (2019).

4. [4] Y. F. Zhang, Y. H. Tang, N. Wang, D. P. Yu, C. S. Lee, I. Bello, and S. T. Lee, Appl. Phys. Lett. 72, 1835 (1998).

5. [5] H. Pan, S. Lim, C. Poh, H. Sun, X. Wu, Y. Feng, and J. Lin, Nanotechnology 16, 417 (2005).

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