Correlation between Copper Precipitation and Grown-In Oxygen Precipitates in 300~mm Czochralski Silicon Wafer
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Published:2014-04
Issue:4
Volume:125
Page:972-975
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ISSN:0587-4246
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Container-title:Acta Physica Polonica A
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language:en
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Short-container-title:Acta Phys. Pol. A
Author:
Dong P.1,
Ma X.Y.1,
Yang D.1
Affiliation:
1. State Key Laboratory of Silicon Materials and Department of Material Science and Engineering Zhejiang University, Hangzhou 310027, China
Publisher
Institute of Physics, Polish Academy of Sciences
Subject
General Physics and Astronomy