Properties and Characterization of ALD Grown Dielectric Oxides for MIS Structures-Reference-Cited by-同舟云学术

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Properties and Characterization of ALD Grown Dielectric Oxides for MIS Structures

Published:2011-05 Issue:5 Volume:119 Page:692-695
ISSN:0587-4246
Container-title:Acta Physica Polonica A
language:en
Short-container-title:Acta Phys. Pol. A

Author:

Gierałtowska S.¹,Sztenkiel D.¹,Guziewicz E.¹,Godlewski M.¹²,Łuka G.¹,Witkowski B.S.¹,Wachnicki Ł.¹,Łusakowska E.¹,Dietl T.¹³,Sawicki M.¹

Affiliation:

1. Institute of Physics, Polish Academy of Sciences, al. Lotników 32/46, 02-668 Warszawa, Poland

2. Natural Sciences College of Science, Cardinal S. Wyszyński University, Warszawa, Poland

3. Institute of Theoretical Physics, University of Warsaw, Warszawa, Poland

Publisher

Institute of Physics, Polish Academy of Sciences

Subject

General Physics and Astronomy

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