1. Heavy Ion Laboratory, Warsaw University, L. Pasteura 5a, 02-093 Warsaw, Poland
2. Institute of Experimental Physics, University of Warsaw, L. Pasteura 5a, 02-093 Warsaw, Poland
3. National Centre for Nuclear Research, A. Sołtana 7, 05-400 Otwock, Poland
4. Institute of Electronic Materials Technology, Wólczyńska 133, 01-919 Warsaw, Poland
5. Warsaw University of Technology, Faculty of Mechatronics, Institute of Micromechanics and Photonics, Department of Design of Precision Devices, Warsaw, Poland
6. Medical University of Warsaw, S. Banacha 1, 02-097 Warsaw, Poland