Raith - Electron Beam Lithography for Research-Reference-Cited by-同舟云学术

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Raith - Electron Beam Lithography for Research

Published:2009-12 Issue:Supplement Volume:116 Page:S-198-S-200
ISSN:0587-4246
Container-title:Acta Physica Polonica A
language:en
Short-container-title:Acta Phys. Pol. A

Author:

Kirchner M.¹,Kahl M.¹

Affiliation:

1. Raith GmbH, Konrad-Adenauer-Allee 8, 44263 Dortmund, Germany

Publisher

Institute of Physics, Polish Academy of Sciences

Subject

General Physics and Astronomy

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Long, stitch-free slot waveguide with s-bend tapered couplers for IR-sensing applications using electron beam lithography;Journal of Vacuum Science & Technology B;2023-01

2. Self-Localizing Stabilized Mega-Pixel Picoliter Arrays with Size-Exclusion Sorting Capabilities;Analytical Chemistry;2010-12-21

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