Resolution in low voltage scanning electron microscopy-Reference-Cited by-同舟云学术

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Resolution in low voltage scanning electron microscopy

Published:1985-12 Issue:3 Volume:140 Page:283-292
ISSN:0022-2720
Container-title:Journal of Microscopy
language:en
Short-container-title:

Author:

Joy David C.

Publisher

Wiley

Subject

Histology,Pathology and Forensic Medicine

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1365-2818.1985.tb02682.x/fullpdf

Reference13 articles.

1. Simple model for electron inelastic mean free path;Ashley;J. Electron Spectrosc. and Related Phenomena,1982

2. Ruckstreukoeffizient und Sekundelektronen Ausbate;Drescher;Z. angew. Phys.,1970

3. The ultimate spatial resolution of electron beam lithography;Joy;Microelectronic Engineering,1983

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