Effects of Deposition Inclination Angle on Microstructure and Electrical Properties of Al-Doped ZnO Coating Films
Author:
Affiliation:
1. Department of Mechanical Engineering; National Cheng Kung University; Tainan 701 Taiwan
2. Center for Micro/Nano Science and Technology; National Cheng Kung University; Tainan 701 Taiwan
Publisher
Wiley
Subject
Materials Chemistry,Marketing,Condensed Matter Physics,Ceramics and Composites
Reference36 articles.
1. Crystallite size dependence of band gap energy for electrodeposited ZnO grown at different temperatures
2. P-28: The Effect of Thermal Shrinkage on Indium Tin Oxide Coated Polyethylene Terephthalate for Flexible Display Applications
3. Effect of Al concentrations on the electrodeposition and properties of transparent Al-doped ZnO thin films
4. Influence of growth temperature on the electrical and structural characteristics of conductive Al-doped ZnO thin films grown by atomic layer deposition
5. Vibrational properties and structure of undoped and Al-doped ZnO films deposited by RF magnetron sputtering
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