Development of crystallographic texture in chemical solution deposited lead zirconate titanate seed layers-Reference-Cited by-同舟云学术

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Development of crystallographic texture in chemical solution deposited lead zirconate titanate seed layers

Published:2017-06-19 Issue:10 Volume:100 Page:4476-4482
ISSN:0002-7820
Container-title:Journal of the American Ceramic Society
language:en
Short-container-title:J Am Ceram Soc

Author:

Borman Trent M.¹²^ORCID,Ko Song Won³,Mardilovich Peter³,Trolier-McKinstry Susan E.¹

Affiliation:

1. Department of Materials Science and Engineering and Materials Research Institute; The Pennsylvania State University; University Park Pennsylvania

2. Department of Materials Science and Engineering; North Carolina State University; Raleigh North Carolina

3. XAAR plc; Cambridge UK

Publisher

Wiley

Subject

Materials Chemistry,Ceramics and Composites

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1111/jace.15019/fullpdf

Reference38 articles.

1. Thin film piezoelectrics for MEMS;Trolier-McKinstry;J Electroceram,2004

2. Sol-gel processing of composite PbTiO3/PLZT thin films;Swartz;Ferroelectrics,1990

3. Processing optimization of lead magnesium niobate-lead titanate thin films for piezoelectric MEMS application;Bastani;J Am Ceram Soc,2012

4. Lateral Scaling of Pb(Mg1/3Nb2/3)O3-PbTiO3 Thin Films for Piezoelectric Logic Applications;Keech;J Appl Phys,2014

5. Recent progress in materials issues for piezoelectric MEMS;Muralt;J Am Ceram Soc,2008

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1. Cracking behavior in lead zirconate titanate films with different Zr/Ti ratios;Applied Physics Letters;2022-10-17

2. Improving PMUT Receive Sensitivity via DC Bias and Piezoelectric Composition;Sensors;2022-07-27

3. Green, Homogeneous Solution for BZT-BCT Thin Film Deposition;Lecture Notes in Electrical Engineering;2022-06-29

4. 32 Element Piezoelectric Micromachined Ultrasound Transducer (PMUT) Phased Array for Neuromodulation;IEEE Open Journal of Ultrasonics, Ferroelectrics, and Frequency Control;2022

5. Low cost, contamination-free, and damage-free fabrication of PZT MEMS on SOI substrate;Journal of Micromechanics and Microengineering;2021-12-28

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