Growth of the ternary Pb(Mn,Nb)O <sub>3</sub> –Pb(Zr,Ti)O <sub>3</sub> thin film with high piezoelectric coefficient on Si by RF sputtering-Reference-Cited by-同舟云学术

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Growth of the ternary Pb(Mn,Nb)O ₃ –Pb(Zr,Ti)O ₃ thin film with high piezoelectric coefficient on Si by RF sputtering

Published:2022-12-10 Issue:4 Volume:106 Page:2347-2356
ISSN:0002-7820
Container-title:Journal of the American Ceramic Society
language:en
Short-container-title:J Am Ceram Soc.

Author:

Jiang Xianyao¹,Wang Jiasheng¹,Duan Zhihua¹^ORCID,Li Chuanqing¹,Wang Tao¹^ORCID,Tang Yanxue¹^ORCID,Zhou Helezi²,Zhao Xiangyong¹,Wang Feifei¹^ORCID

Affiliation:

1. Key Laboratory of Optoelectronic Material and Device Department of Physics Shanghai Normal University Shanghai China

2. State Key Laboratory of Materials Processing and Die & Mould Technology School of Materials Science and Engineering Huazhong University of Science and Technology Wuhan China

Funder

National Natural Science Foundation of China

Huazhong University of Science and Technology

Publisher

Wiley

Subject

Materials Chemistry,Ceramics and Composites

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1111/jace.18918

Reference30 articles.

1. Tutorial: Piezoelectric and magnetoelectric N/MEMS—Materials, devices, and applications

2. PZT thin films for microsensors and actuators: Where do we stand?

3. Piezoelectric PZT MEMS technologies for small-scale robotics and RF applications

4. Hydrodynamic responses of a piezoelectric driven MEMS inkjet print-head

5. A review of vibration-based MEMS piezoelectric energy harvesters

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